Statistics
Publications
7
Citations
134
H-Index
7
Active since
2007
Fumio Iwamoto is an author at IMEC specializing in engineering, microfabrication, and microelectronics.
Publications per year
2007–2009
7
7
Extreme ultraviolet lithography at IMEC: Shadowing compensation and flare mitigation strategy
Gian F. Lorusso, A. M. Goethals, R. Jonckheere et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 30 citations
Engineering, Extreme Ultraviolet Lithography, Beam Lithography +12
Status of EUV lithography at IMEC
A. M. Goethal, R. Jockheere, C. F. Lurusso et al. · Journal of Photopolymer Science and Technology · 2007 · 19 citations · Full text
Electrical Engineering, Engineering, Interference Lithography +15
Investigation of EUV mask defectivity via full-field printing and inspection on wafer
R. Jonckheere, Dieter Van den Heuvel, Fumio Iwamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations
Engineering, Electron-beam Lithography, Mechanical Engineering +17
1–5 of 7