Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Wim Bogaerts, R. Baets, Pieter Dumon, +7

Journal of Lightwave Technology

EngineeringIntegrated PhotonicsIntegrated CircuitsSilicon On InsulatorPhotonic Crystals +17

Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography

Pieter Dumon, Wim Bogaerts, Vincent Wiaux, +8

IEEE Photonics Technology Letters

PhotonicsRing ResonatorsEngineeringCompact RacetrackApplied Physics +10

Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires

Wim Bogaerts, Pieter Dumon, Dries Van Thourhout, +6

IEEE Journal of Selected Topics in Quantum Electronics

Photonic DevicePhotonicsCompact Wavelength-selective ElementsOptical InterconnectsEngineering +11

Basic structures for photonic integrated circuits in Silicon-on-insulator

Wim Bogaerts, Dirk Taillaert, Bert Luyssaert, +7

Optics Express

Compact IntegrationEngineeringIntegrated PhotonicsIntegrated CircuitsBasic Structures +15

Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography

Wim Bogaerts, Vincent Wiaux, Dirk Taillaert, +4

IEEE Journal of Selected Topics in Quantum Electronics

EngineeringIntegrated PhotonicsIntegrated CircuitsMicro-optical ComponentSilicon On Insulator +18

Ultralow-loss 3-dB photonic crystal waveguide splitter

Lars H. Frandsen, P.I. Borel, Yanxin Zhuang, +9

Optics Letters

Double patterning design split implementation and validation for the 32nm node

Martin Drapeau, Vincent Wiaux, Eric Hendrickx, +2

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyElectronic Design AutomationComputer ArchitectureDesign Split Implementation +19

Double pattern EDA solutions for 32nm HP and beyond

George E. Bailey, Alexander Tritchkov, Jea-Woo Park, +6

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Double-patterning TechniqueEngineeringVlsi DesignElectronic Design AutomationMicroscopy +18

Application challenges with double patterning technology (DPT) beyond 45 nm

Jungchul Park, Stephen Hsu, Douglas Van Den Broeke, +11

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyPattern TransferSmall 2DComputer-aided Design +24

SOI nanophotonic waveguide structures fabricated with deep UV lithography

Wim Bogaerts, Pieter Dumon, Dirk Taillaert, +6

Photonics and Nanostructures - Fundamentals and Applications

PhotonicsEngineeringApplied PhysicsDeep Uv LithographyPlanar Waveguide Sensor +5