Dieter Van den Heuvel

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +15

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 48 citations

Engineering, Materials Engineering, Materials Science +17

Repair of natural EUV reticle defects

R. Jonckheere, T. Bret, Dieter Van den Heuvel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 42 citations

Natural Sciences, Manufacturing Engineering, Materials Science +13

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

EUV Resist Process Performance Investigations on the NXE3100 Full Field Scanner

Anne-Marie Goethals, Philippe Foubert, Kohei Hosokawa et al. · Journal of Photopolymer Science and Technology · 2012 · 30 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +13