Dieter Van den Heuvel

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Engineering, Dsa Program, Defect Stability +21

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 48 citations

Repair of natural EUV reticle defects

R. Jonckheere, T. Bret, Dieter Van den Heuvel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 42 citations

Defect Tolerance, Electrical Engineering, Wafer Scale Processing +15

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 37 citations

Materials Science, Materials Engineering, Defect Tolerance +14

EUV Resist Process Performance Investigations on the NXE3100 Full Field Scanner

Anne-Marie Goethals, Philippe Foubert, Kohei Hosokawa et al. · Journal of Photopolymer Science and Technology · 2012 · 30 citations · Full text

Hp Contacts, Electrical Engineering, Wafer Scale Processing +12