Statistics
Publications
1
Citations
19
H-Index
1
Active since
2007
Affiliations
Samsung (South Korea)(Current)
A. M. Goethal is an author at Samsung (South Korea) specializing in integrated circuits, microfabrication, and instrumentation.
Publications per year
2007–2007
1
1
Status of EUV lithography at IMEC
A. M. Goethal, R. Jockheere, C. F. Lurusso et al. · Journal of Photopolymer Science and Technology · 2007 · 19 citations · Full text
Electrical Engineering, Engineering, Interference Lithography +15
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