Kimmo Henttinen

Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO[sub 2]

Tommi Suni, Kimmo Henttinen, I. Suni et al. · Journal of The Electrochemical Society · 2002 · 322 citations

Engineering, Materials Engineering, Materials Science +17

Mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Kimmo Henttinen, I. Suni, S. S. Lau · Applied Physics Letters · 2000 · 43 citations

Engineering, Materials Engineering, Materials Science +17

MEMS on cavity-SOI wafers

Hannu Luoto, Kimmo Henttinen, Tommi Suni et al. · Solid-State Electronics · 2007 · 32 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Pradeep Dixit, Tapani Vehmas, Sami Vähänen et al. · Journal of Micromechanics and Microengineering · 2012 · 28 citations

Engineering, Electrical Engineering, Materials Science +17

Single crystal Si layers on glass formed by ion cutting

Ming Cai, D. Qiao, L. S. Yu et al. · Journal of Applied Physics · 2002 · 25 citations

Engineering, Materials Engineering, Materials Science +17