Tapani Vehmas

Open-Access 3-μm SOI Waveguide Platform for Dense Photonic Integrated Circuits

Timo Aalto, Matteo Cherchi, Mikko Harjanne et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2019 · 112 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Unconstrained splitting ratios in compact double-MMI couplers

Matteo Cherchi, Sami Ylinen, Mikko Harjanne et al. · Optics Express · 2014 · 35 citations · Full text

Engineering, Electrical Engineering, Materials Science +15

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Pradeep Dixit, Tapani Vehmas, Sami Vähänen et al. · Journal of Micromechanics and Microengineering · 2012 · 28 citations

Engineering, Electrical Engineering, Materials Science +17

Low-loss spiral waveguides with ultra-small footprint on a micron scale SOI platform

Matteo Cherchi, Sami Ylinen, Mikko Harjanne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 24 citations

Engineering, Electrical Engineering, Microfabrication +14

The Euler bend: paving the way for high-density integration on micron-scale semiconductor platforms

Matteo Cherchi, Sami Ylinen, Mikko Harjanne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 24 citations

Engineering, Electrical Engineering, Materials Science +17