Concepedia

Sami Vähänen

SV

Statistics

Publications

5

Citations

104

H-Index

5

Active since

2008

Affiliations

VTT Technical Research Centre of Finland(Current)

Sami Vähänen is an author at VTT Technical Research Centre of Finland specializing in engineering, semiconductor devices, and materials science.

Publications per year

2008–2017

5

Publications

5

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Pradeep Dixit, Tapani Vehmas, Sami Vähänen et al. · Journal of Micromechanics and Microengineering · 2012 · 28 citations

Engineering, Electrical Engineering, Materials Science +17

Effect of Process Gases on Fabricating Tapered Through-Silicon vias by Continuous SF<sub>6</sub>/O<sub>2</sub>/Ar Plasma Etching

Pradeep Dixit, Sami Vähänen, Jaakko Salonen et al. · ECS Journal of Solid State Science and Technology · 2012 · 26 citations

Engineering, Materials Engineering, Materials Science +17

Advanced processing of CdTe pixel radiation detectors

A. Gädda, Alexander Winkler, J. Ott et al. · Journal of Instrumentation · 2017 · 25 citations

Engineering, Materials Engineering, Materials Science +17

GaAs Medipix2 hybrid pixel detector

Pasi Kostamo, S. Nenonen, Sami Vähänen et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2008 · 14 citations

Engineering, Electrical Engineering, Radiation Detection +11

Edge pixel response studies of edgeless silicon sensor technology for pixellated imaging detectors

D. Maneuski, R. L. Bates, A. Blue et al. · Journal of Instrumentation · 2015 · 11 citations · Full text

Engineering, Biomedical Engineering, Photonics +16

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