Concepedia

Hannu Luoto

HL

Statistics

Publications

4

Citations

81

H-Index

4

Active since

2005

Affiliations

VTT Technical Research Centre of Finland(Current)

Okmetic (Finland)

Hannu Luoto is an author at VTT Technical Research Centre of Finland specializing in applied physics, microfabrication, and engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationMaterial ScienceElectronic PackagingMaterials EngineeringElectrical EngineeringMechanical EngineeringPhysics

Publications per year

2005–2007

4

Publications

4

MEMS on cavity-SOI wafers

Hannu Luoto, Kimmo Henttinen, Tommi Suni et al. · Solid-State Electronics · 2007 · 31 citations

Cavity-soi Wafers, Wafer Scale Processing, Engineering +6

Wafer Scale Packaging of MEMS by Using Plasma-Activated Wafer Bonding

Tommi Suni, Kimmo Henttinen, Antti Lipsanen et al. · Journal of The Electrochemical Society · 2005 · 23 citations

Mems Devices, Engineering, Plasma Processing +16

Silicon-on-Insulator Wafers with Buried Cavities

Tommi Suni, Kimmo Henttinen, James Dekker et al. · Journal of The Electrochemical Society · 2006 · 14 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Fabrication of single crystal silicon resonators with narrow gaps

Jyrki Kiihamäki, V. Kaajakari, Hannu Luoto et al. · 2005 · 13 citations

Materials Science, Materials Engineering, Electrostatic Actuation +14

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