MEMS on cavity-SOI wafers

Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications

V. Kaajakari, T. Mattila, A. Oja et al. · IEEE Electron Device Letters · 2004 · 186 citations

Engineering, Electrical Engineering, Physics +17

High aspect ratio nano-structures (HARNS) for photonic mems based on vertical DBR architecture

Frédéric Marty, Bassam Saadany, Tarik Bourouina et al. · 2005 · 15 citations

Engineering, Electrical Engineering, Materials Science +17

A micromechanical resonating RF mixer

Ari Alastalo, Mika Koskenvuori, Heikki Seppä et al. · 2004 · 15 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Analysis of a MEMS transmission line

Ari Alastalo, T. Mattila, Heikki Seppä · IEEE Transactions on Microwave Theory and Techniques · 2003 · 14 citations

Engineering, Electrical Engineering, Acoustics +16