Antti Lipsanen

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Publications

Citations

125

H-Index

Active since

2004

Affiliations

VTT Technical Research Centre of Finland(Current)

Antti Lipsanen is an author at VTT Technical Research Centre of Finland specializing in microelectromechanical systems, materials science, and engineering.

Publications per year

2004–2005

Publications

Nonlinear mechanical effects in silicon longitudinal mode beam resonators

V. Kaajakari, Tomi Mattila, Antti Lipsanen et al. · Sensors and Actuators A Physical · 2004 · 102 citations

Engineering, Materials Science, Mechanical Engineering +14

Wafer Scale Packaging of MEMS by Using Plasma-Activated Wafer Bonding

Tommi Suni, Kimmo Henttinen, Antti Lipsanen et al. · Journal of The Electrochemical Society · 2005 · 23 citations

Engineering, Electrical Engineering, Materials Science +17

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