Concepedia

I. Suni

IS

Statistics

Publications

2

Citations

363

H-Index

2

Active since

2002

Affiliations

VTT Technical Research Centre of Finland(Current)

I. Suni is an author at VTT Technical Research Centre of Finland specializing in applied physics, materials science, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsChemistryThin FilmsMicrostructurePhysical ChemistryIntegrated Circuits

Publications per year

2002–2002

2

Publications

2

Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO[sub 2]

Tommi Suni, Kimmo Henttinen, I. Suni et al. · Journal of The Electrochemical Society · 2002 · 316 citations

Engineering, Low-temperature Bonding, Integrated Circuits +16

TaC as a diffusion barrier between Si and Cu

Tomi Laurila, Kejun Zeng, J.K. Kivilahti et al. · Journal of Applied Physics · 2002 · 47 citations

Engineering, Solid-state Chemistry, Silicon On Insulator +16

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