Concepedia

Author

Kazuhide Ino

Tohoku University

Also Known As

K. Ino, Kazuhide INO, Kazuhide Ino

27

Publications

237

Citations

9

H-Index

18

Concepts

All Affiliations

Tohoku University
KI

About

Kazuhide Ino is an author at Tohoku University specializing in engineering, electrical engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

189

2

Electrical Engineering

6

6

173

3

Applied Physics

4

4

144

4

Materials Engineering

2

2

24

5

Chemical Engineering

1

1

16

Kazuhide Ino

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7

Publications

189

Citations

7

H-Index

YearCitations

Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films

Kazuhide Ino, Toshikuni Shinohara, T. Ushiki,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1997

83

Tantalum-gate thin-film SOI nMOS and pMOS for low-power applications

Hiroyuki Shimada, Y. Hirano, T. Ushiki,

IEEE Transactions on Electron Devices

1997

37

SiC Power Device Evolution Opening a New Era in Power Electronics

Kazuhide Ino, Mineo Miura, Yuki Nakano,

2019

19

Plasma enhanced in situ chamber cleaning evaluated by extracted-plasma-parameter analysis

Kazuhide Ino, I. Natori, Akinori Ichikawa,

IEEE Transactions on Semiconductor Manufacturing

1996

16

Gate oxide reliability concerns in gate-metal sputtering deposition process: an effect of low-energy large-mass ion bombardment

T. Ushiki, Mo-Chiun Yu, K. Kawai,

Microelectronics Reliability

1999

14

Improvement of gate oxide reliability for tantalum-gate MOS devices using xenon plasma sputtering technology

T. Ushiki, K. Kawai, Mo-Chiun Yu,

IEEE Transactions on Electron Devices

1998

10

Automotive Traction Inverter Utilizing SiC Power Module

Masaharu Nakanishi, Kenji Hayashi, Akifumi Enomoto,

PCIM Europe 2018; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management

2018

10

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