Concepedia

K. Kawai

KK

4

Publications

55

Citations

4

H-Index

1998

Active since

Affiliations

Tohoku University(Current)

K. Kawai is an author at Tohoku University specializing in electrical engineering, nanoelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsNanoelectronicsMicroelectronicsElectrical EngineeringMaterials EngineeringPhysicsDevice ModelingMaterial ScienceElectronic Engineering

Publications per year

1998–2000

4

Publications

4

Chemical reaction concerns of gate metal with gate dielectric in Ta gate MOS devices: an effect of self-sealing barrier configuration interposed between Ta and SiO/sub 2/

T. Ushiki, K. Kawai, Ichiro Ohshima et al. · IEEE Transactions on Electron Devices · 2000 · 17 citations

Materials Science, Electrical Engineering, Engineering +11

Gate oxide reliability concerns in gate-metal sputtering deposition process: an effect of low-energy large-mass ion bombardment

T. Ushiki, Mo-Chiun Yu, K. Kawai et al. · Microelectronics Reliability · 1999 · 14 citations

Materials Engineering, Electrical Engineering, Ion Implantation +9

New aspects and mechanism of kink effect in static back-gate transconductance characteristics in fully-depleted SOI MOSFETs on high-dose SIMOX wafers

T. Ushiki, Kazuhiko Kotani, Tsuyoshi Funaki et al. · IEEE Transactions on Electron Devices · 2000 · 14 citations

Device Modeling, Electrical Engineering, Engineering +13

Improvement of gate oxide reliability for tantalum-gate MOS devices using xenon plasma sputtering technology

T. Ushiki, K. Kawai, Mo-Chiun Yu et al. · IEEE Transactions on Electron Devices · 1998 · 10 citations

Gate Oxide Reliability, Engineering, Ion Species +16

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