T. Ushiki

Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films

Kazuhide Ino, Toshikuni Shinohara, T. Ushiki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 83 citations

Engineering, Ion Bombardment Conditions, Thin Film Process Technology +16

Tantalum-gate thin-film SOI nMOS and pMOS for low-power applications

Hiroyuki Shimada, Y. Hirano, T. Ushiki et al. · IEEE Transactions on Electron Devices · 1997 · 37 citations

Electrical Engineering, Engineering, Nanoelectronics +10

Reliable tantalum-gate fully-depleted-SOI MOSFET technology featuring low-temperature processing

T. Ushiki, Mo-Chiun Yu, Y. Hirano et al. · IEEE Transactions on Electron Devices · 1997 · 29 citations

Materials Engineering, Reliable Tantalum, Electrical Engineering +11

Tantalum nitride metal gate FD-SOI CMOS FETs using low resistivity self-grown bcc-tantalum layer

Hiroyuki Shimada, Ichiro Ohshima, T. Ushiki et al. · IEEE Transactions on Electron Devices · 2001 · 25 citations

Materials Science, Materials Engineering, Electrical Engineering +11

Effect of starting SOI material quality on low-frequency noise characteristics in partially depleted floating-body SOI MOSFETs

T. Ushiki, H. Ishino, T. Ohmi · IEEE Electron Device Letters · 2000 · 18 citations

Soi Material Quality, Electrical Engineering, Engineering +14