Concepedia

Toshikuni Shinohara

TS

2

Publications

97

Citations

2

H-Index

1997

Active since

Affiliations

Tohoku University(Current)

Toshikuni Shinohara is an author at Tohoku University specializing in electrical engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringThin FilmsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline DefectsMaterials Engineering

Publications per year

1997–1999

2

Publications

2

Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films

Kazuhide Ino, Toshikuni Shinohara, T. Ushiki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 83 citations

Engineering, Ion Bombardment Conditions, Thin Film Process Technology +16

Gate oxide reliability concerns in gate-metal sputtering deposition process: an effect of low-energy large-mass ion bombardment

T. Ushiki, Mo-Chiun Yu, K. Kawai et al. · Microelectronics Reliability · 1999 · 14 citations

Materials Engineering, Electrical Engineering, Ion Implantation +9

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