Concepedia

Author

Toshikuni Shinohara

Tohoku University

Also Known As

Toshikuni Shinohara

2

Publications

97

Citations

2

H-Index

10

Concepts

All Affiliations

Tohoku University
TS

About

Toshikuni Shinohara is an author at Tohoku University specializing in electrical engineering, applied physics, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

97

2

Applied Physics

2

2

97

3

Electrical Engineering

2

2

97

4

Materials Engineering

1

1

14

5

Materials Science

1

1

83

Toshikuni Shinohara

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2

Publications

97

Citations

2

H-Index

YearCitations

Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films

Kazuhide Ino, Toshikuni Shinohara, T. Ushiki,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1997

83

Gate oxide reliability concerns in gate-metal sputtering deposition process: an effect of low-energy large-mass ion bombardment

T. Ushiki, Mo-Chiun Yu, K. Kawai,

Microelectronics Reliability

1999

14

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