Concepedia

I. Natori

IN

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Publications

2

Citations

30

H-Index

2

Active since

1992

Affiliations

Tohoku University(Current)

I. Natori is an author at Tohoku University specializing in engineering, plasma confinement, and water purification.

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Publications per year

1992–1996

2

Publications

2

Plasma enhanced in situ chamber cleaning evaluated by extracted-plasma-parameter analysis

Kazuhide Ino, I. Natori, Akinori Ichikawa et al. · IEEE Transactions on Semiconductor Manufacturing · 1996 · 16 citations

, , +11

Minimizing damage and contamination in RIE processes by extracted-plasma-parameter analysis

Takashi Yamashita, Satoshi Hasaka, I. Natori et al. · IEEE Transactions on Semiconductor Manufacturing · 1992 · 14 citations

, , +17

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