5
Publications
231
Citations
5
H-Index
1997
Active since
Affiliations
Georgia Institute of Technology(Current)
A. Kapoor is an author at Georgia Institute of Technology specializing in engineering, microelectronics, and electrical engineering.
Top concepts
EngineeringMetrologyStatisticsMeasurementMaterial ScienceMicroelectronicsElectronic PackagingElectrical EngineeringUncertainty QuantificationCorrosion
Publications per year
1997–2011
5
5
Statistical metrology for characterizing CMP processes
Sharad Prasad, W. Loh, A. Kapoor et al. · Microelectronic Engineering · 1997 · 12 citations
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