Sharad Prasad is an author at IIT@MIT specializing in statistics, measurement, and probability theory.
Top concepts
MetrologyStatisticsEngineeringMeasurementProbabilityProcess MeasurementUncertainty Quantification
Publications per year
1997–1997
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Statistical metrology for characterizing CMP processes
Sharad Prasad, W. Loh, A. Kapoor et al. · Microelectronic Engineering · 1997 · 12 citations
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