W. Loh

The physical and electrical effects of metal-fill patterning practices for oxide chemical-mechanical polishing processes

B.E. Stine, Duane S. Boning, J.E. Chung et al. · IEEE Transactions on Electron Devices · 1998 · 159 citations

Natural Sciences, Electrical Engineering, Materials Science +10

Impact of interconnect pattern density information on a 90 nm technology ASIC design flow

Payman Zarkesh-Ha, S. Lakshminarayanan, Ken Doniger et al. · 2004 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +17

On a pin versus gate relationship for heterogeneous systems: heterogeneous Rent's rule

Payman Zarkesh-Ha, Jeffrey A. Davis, W. Loh et al. · 2002 · 23 citations

Computing, Computer Engineering, Computer Science +2

Statistical metrology for characterizing CMP processes

Sharad Prasad, W. Loh, A. Kapoor et al. · Microelectronic Engineering · 1997 · 12 citations

Engineering, Manufacturing Engineering, Metrology +9

Stochastic interconnect network fan-out distribution using Rent's rule

Payman Zarkesh-Ha, Jeffrey A. Davis, W. Loh et al. · 2002 · 11 citations

Computing, Computer Science, Electrical Engineering +13