Concepedia

E. Chang

EC

3

Publications

72

Citations

3

H-Index

1997

Active since

Affiliations

Hewlett-Packard (United States)(Current)

E. Chang is an author at Hewlett-Packard (United States) specializing in measurement, engineering, and metrology.

Top concepts

Publications per year

1997–2002

3

Publications

3

Using a statistical metrology framework to identify systematic and random sources of die- and wafer-level ILD thickness variation in CMP processes

E. Chang, B.E. Stine, T. Maung et al. · 2002 · 46 citations

, , +21

Assessing and characterizing inter-and intra-die variation using a statistical metrology framework: A CMP case study

R. Divecha, B.E. Stine, E. Chang et al. · Computer Standards & Interfaces · 1999 · 14 citations

, , +7

Statistical metrology for characterizing CMP processes

Sharad Prasad, W. Loh, A. Kapoor et al. · Microelectronic Engineering · 1997 · 12 citations

, , +7

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