Michael Crouse

Self-ordered pore structure of anodized aluminum on silicon and pattern transfer

David T. Crouse, Yu‐Hwa Lo, A. E. Miller et al. · Applied Physics Letters · 2000 · 310 citations

Engineering, Nanoporous Material, Porous Membrane +24

High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography

P. Agnello, T. Ivers, C. Warm et al. · 2006 · 115 citations

Engineering, Vlsi Design, Enhanced Strain +21

The use of EUV lithography to produce demonstration devices

Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations

Nanoporous Alumina Template with In Situ Barrier Oxide Removal, Synthesized from a Multilayer Thin Film Precursor

Michael Crouse, Albert E. Miller, David T. Crouse et al. · Journal of The Electrochemical Society · 2005 · 33 citations

Materials Science, Porous Alumina, Chemical Engineering +12

Silicon containing polymer in applications for 193 nm high NA lithography processes

Sean Burns, Dirk Pfeiffer, Arpan P. Mahorowala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

Optical Materials, Engineering, Electron-beam Lithography +17