Author
Dirk Pfeiffer
Also Known As
D. G. Pfeiffer, Dirk Pfeiffer
34
Publications
483
Citations
12
H-Index
49
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 9 | 9 | 257 |
2 | Applied Physics | 7 | 7 | 211 |
3 | Chemistry | 4 | 4 | 150 |
4 | Natural Sciences | 1 | 1 | 60 |
5 | Computer Engineering | 1 | 1 | 34 |
Dirk Pfeiffer
×
11
Publications
339
Citations
11
H-Index
| Year | Citations | |
|---|---|---|
2012 | 70 | |
2000 | 60 | |
1999 | 56 | |
2011 | 34 | |
2003 | 27 | |
1999 | 22 | |
Silicon containing polymer in applications for 193 nm high NA lithography processes Sean Burns, Dirk Pfeiffer, Arpan P. Mahorowala, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyReflectivity SuppressionNm Lithography Resolution | 2006 | 18 |
2007 | 15 | |
2003 | 13 | |
2005 | 12 |
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