27
Publications
809
Citations
16
H-Index
2000
Active since
Sean Burns is an author at The University of Texas at Austin specializing in engineering, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationChemistrySurface ScienceElectrical EngineeringOptical PropertiesBiophysics
Publications per year
2000–2021
27
27
Direct Measurement of the Reaction Front in Chemically Amplified Photoresists
Eric K. Lin, Christopher L. Soles, Darı́o L. Goldfarb et al. · Science · 2002 · 75 citations
Engineering, Microscopy, Chemistry +24
FINFET technology featuring high mobility SiGe channel for 10nm and beyond
Dechao Guo, G. Karve, Gen Tsutsui et al. · 2016 · 64 citations
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