Concepedia

Advances and challenges in chemical mechanical polishing of silicon carbide: materials, mechanisms, and future directions

Ailin Li, Jiakai Zhou, Xinhuan Niu, Qing Ma, Mengqi Wang, Bin Hu

Journal of Materials Chemistry C · 2025 · 14 citations · 143 references

DOI

Concepts

Abstract

Silicon carbide (SiC), a third-generation wide bandgap semiconductor material, demonstrates immense potential in high-temperature, high-frequency, and high-power electronic devices.

References

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Environment friendly chemical mechanical polishing of copper

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Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

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