Silicon · 2022 · 11 citations · 39 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice ModelingDopingIntegrated Circuit DesignNanoelectronicsSemiconductor Device MaterialsSemiconductor PhysicsChannel DopingChannel Doping EffectsGate Oxide Thickness EffectsGate Stack EngineeringGate-all-around Transistor ScalingGate-all-around TransistorsGate-dependent Current-voltage BehaviorNanoscale Transistors
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Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 988 citations
FinFET scaling to 10 nm gate length
Bin Yu, Leland Chang, Safayet Ahmed et al. · 2003 · 595 citations
Scaling theory for double-gate SOI MOSFET's
Ken Suzuki, Tetsu Tanaka, Y. Tosaka et al. · IEEE Transactions on Electron Devices · 1993 · 556 citations · Full text
Engineering, Electrical Engineering, Electronic Materials +16
High performance fully-depleted tri-gate CMOS transistors
B.S. Doyle, Suman Datta, M. Doczy et al. · IEEE Electron Device Letters · 2003 · 453 citations