RF Performance of Al<sub>0.85</sub>Ga<sub>0.15</sub>N/Al<sub>0.70</sub>Ga<sub>0.30</sub>N High Electron Mobility Transistors With 80-nm Gates

Albert G. Baca, Brianna Klein, Joel R. Wendt, Stefan Lepkowski, Christopher Nordquist, Andrew Armstrong, Andrew A. Allerman, E Douglas, Robert Kaplar

IEEE Electron Device Letters · 2018 · 64 citations · 21 references

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Abstract

Al-rich AlGaN-channel high electron mobility transistors with 80-nm long gates and 85% (70%) Al in the barrier (channel)were evaluated for RF performance. The dc characteristics include a maximum current of 160 mA/mm with a transconductance of 24 mS/mm, limited by source and drain contacts, and an on/off current ratio of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">9</sup> . f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> of 28.4 GHz and f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">MAX</sub> of 18.5 GHz were determined from smallsignal S-parameter measurements. Output power density of 0.38 W/mm was realized at 3 GHz in a power sweep using on-wafer load pull techniques.

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