Formation, processing and characterization of Co–Sn intermetallic compounds for potential integration in 3D interconnects

George Vakanas, O Minho, Biljana Dimčić, Kris Vanstreels, Björn Vandecasteele, Inge De Preter, Jaber Derakhshandeh, Kenneth June Rebibis, Masanori Kajihara, Ingrid De Wolf,

Microelectronic Engineering · 2015 · 51 citations · 10 references

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