Electronic Materials Letters · 2018 · 24 citations · 19 references
EngineeringMaterials ScienceHeat TransferSemiconductor DevicesThermal AnalysisCmos Circuit DesignComplementary Metal-oxide-semiconductor TechnologyThermal StressesWafer BondingElectronics Thermal PackagingLow-temperature BondingThermal Stress ManagementThermo-mechanical StressThermocompression Bonding
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Surface activated bonding of silicon wafers at room temperature
Hideki Takagi, Kenya Kikuchi, Ryutaro Maeda et al. · Applied Physics Letters · 1996 · 441 citations