Ion-assisted gate recess process induced damage in GaN channel of AlGaN/GaN Schottky barrier diodes studied by deep level transient spectroscopy

Philippe Ferrandis, Matthew Charles, Yannick Baines, Julien Buckley, G. Garnier, C. Gillot, G. Reimbold

Japanese Journal of Applied Physics · 2017 · 16 citations · 25 references

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