Effect of number of laser pulses on p + /n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing - Concepedia

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Effect of number of laser pulses on p + /n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing

10

Citations

11

References

2016

Year

Sang Min Jung, Chul Jin Park, Hongsik Jeong, Moo Whan Shin

Materials Science in Semiconductor Processing

PhotonicsAdvanced Laser ProcessingEngineeringPhysicsApplied PhysicsUltra-shallow Junction FormationLaser-assisted DepositionPulsed Laser DepositionOptoelectronicsSilicon On InsulatorLaser Pulses

References

	Year	Citations

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