Rapid Thermal Annealing in Si - Concepedia

Concepedia

Publication | Closed Access

Rapid Thermal Annealing in Si

20

Citations

16

References

1984

Year

T. E. Seidel, C. S. Pai, D. J. Lischner, D. M. Maher, R. V. Knoell, J. S. Williams, B.R. Penumalli, D. C. Jacobson

MRS Proceedings

PhysicsApplied PhysicsRapid Thermal AnnealingSemiconductor Device FabricationSilicon On InsulatorSilicon Debugging

References

	Year	Citations

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