R. V. Knoell

Ion-beam-induced crystallization and amorphization of silicon

R. G. Elliman, J. S. Williams, W. L. Brown et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 173 citations

Ion Implantation, Ion-beam-induced Crystallization, Applied Physics +2

Study of cobalt-disilicide formation from cobalt monosilicide

A. Appelbaum, R. V. Knoell, S. P. Murarka · Journal of Applied Physics · 1985 · 95 citations · Full text

Materials Science, Inorganic Chemistry, Semiconductors +13

Crystallization of amorphous silicon films during low pressure chemical vapor deposition

E. Kinsbron, Marek Sternheim, R. V. Knoell · Applied Physics Letters · 1983 · 71 citations

Engineering, Thin Film Process Technology, Chemical Deposition +16

Nitrogen, oxygen, and argon incorporation during reactive sputter deposition of titanium nitride

Doug Williams, F. A. Baiocchi, R. C. Beairsto et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 46 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Ion-beam induced crystallization and amorphization at a crystalline/amorphous interface in <100> silicon

A. Leiberich, D. M. Maher, R. V. Knoell et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 42 citations

Materials Science, Ion Implantation, Engineering +5