MRS Proceedings · 1998 · 30 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceBiomemsMicroelectromechanical SystemsMicrofabricationMems DesignMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningMicrostructure ControlMicroelectromechanical System FabricationMicroenginesSilicon Carbide
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