Arturo A. Ayón

Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher

Arturo A. Ayón, Rebecca A. Braff, C. C. Lin et al. · Journal of The Electrochemical Society · 1999 · 408 citations

Electrical Engineering, Anisotropic Profiles, Engineering +13

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Kuo‐Shen Chen, Arturo A. Ayón, Xin Zhang et al. · Journal of Microelectromechanical Systems · 2002 · 243 citations

Engineering, Mechanical Engineering, Silicon On Insulator +17

A six-wafer combustion system for a silicon micro gas turbine engine

A. Mehra, Xin Zhang, Arturo A. Ayón et al. · Journal of Microelectromechanical Systems · 2000 · 222 citations

Engineering, Mechanical Engineering, Six-wafer Combustion System +16

Micro-heat engines, gas turbines, and rocket engines - The MIT microengine project

Alan H. Epstein, S.D. Senturia, O. Al-Midani et al. · 28th Fluid Dynamics Conference · 1997 · 202 citations

Engineering, Energy Efficiency, Energy Conversion +25

Molding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications

Albert Folch, Arturo A. Ayón, Octavio Hurtado et al. · Journal of Biomechanical Engineering · 1999 · 174 citations