Kuo‐Shen Chen - Concepedia

Author

Kuo‐Shen Chen

National Cheng Kung University ORCID

Also Known As

Chen Kuo-Shen, Chen, Kunyi, Chen, Kylin, Chong, K S Chen, K-S Chen, K-S. Chen, K. -S. Chen, K. Chen, K. S. Chen

239

Publications

3.2K

Citations

H-Index

104

Concepts

All Affiliations

National Cheng Kung University Massachusetts Institute of Technology Boston University American Institute of Aeronautics and Astronautics

About

Kuo‐Shen Chen is an author at National Cheng Kung University specializing in engineering, mechanical engineering, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	25	46	2.1K
2	Applied Physics	13	14	858
3	Biomedical Engineering	4	4	182
4	Computer Engineering	2	2	56
5	Civil Engineering	1	1	10

Kuo‐Shen Chen

Publications

Citations

H-Index

Page 1

	Year	Citations
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) Kuo‐Shen Chen, Arturo A. Ayón, Xin Zhang, Journal of Microelectromechanical Systems EngineeringMechanical EngineeringSilicon On InsulatorWafer Scale ProcessingDeep Reactive Ion	2002	243
Micro-heat engines, gas turbines, and rocket engines - The MIT microengine project Alan H. Epstein, S.D. Senturia, O. Al-Midani, 28th Fluid Dynamics Conference EngineeringEnergy EfficiencyEnergy ConversionMechanical EngineeringElectrothermal	1997	202
Controlling and Testing the Fracture Strength of Silicon on the Mesoscale Kuo‐Shen Chen, Arturo A. Ayón, S.M. Spearing Journal of the American Ceramic Society EngineeringMicromechanicsMechanical EngineeringWeibull Reference StrengthsSilicon On Insulator	2000	119
Viscoelastic Characterization and Modeling of Polymer Transducers for Biological Applications I-Kuan Lin, Kuang-Shun Ou, Yen-Ming Liao, Journal of Microelectromechanical Systems EngineeringMultiscale MechanicsMicromechanicsMechanical EngineeringBiomedical Engineering	2009	83
Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films Xingcai Zhang, Kuo‐Shen Chen, Reza Ghodssi, Sensors and Actuators A Physical Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringThick Tetraethylorthosilicate	2001	81
Design and control for an electromagnetically driven X–Y–θ stage Kuo‐Shen Chen, David L. Trumper, Stuart T. Smith Precision Engineering Electrical EngineeringEngineeringX–y–θ StageMicrowave EngineeringElectromagnetic Compatibility	2002	77
Modification of curvature-based thin-film residual stress measurement for MEMS applications Kuo‐Shen Chen, K-S Ou Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringMicroelectromechanical SystemsResidual StressMicro-electromechanical System	2002	71
Intrinsic stress generation and relaxation of plasma-enhanced chemical vapor deposited oxide during deposition and subsequent thermal cycling Kuo‐Shen Chen, Xin Zhang, Shih-Yuan Lin Thin Solid Films Materials ScienceEngineeringSubsequent Thermal CyclingSurface ScienceApplied Physics	2003	67
Development of semi-empirical formulation for extracting materials properties from nanoindentation measurements: Residual stresses, substrate effect, and creep Kuo‐Shen Chen, Tuo-Cheng Chen, Kuang-Shun Ou Thin Solid Films Materials ScienceEngineeringSemi-empirical FormulationStrain LocalizationMechanical Behavior	2007	65
Finite-element analysis on wafer-level CMP contact stress: reinvestigated issues and the effects of selected process parameters Kuo‐Shen Chen, Huei‐Ming Yeh, Jujian Yan, The International Journal of Advanced Manufacturing Technology Materials ScienceWafer Scale ProcessingEngineeringProcess ParametersAdvanced Packaging (Semiconductors)	2008	55

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