Kuo‐Shen Chen

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Kuo‐Shen Chen, Arturo A. Ayón, Xin Zhang et al. · Journal of Microelectromechanical Systems · 2002 · 243 citations

Engineering, Mechanical Engineering, Silicon On Insulator +17

Micro-heat engines, gas turbines, and rocket engines - The MIT microengine project

Alan H. Epstein, S.D. Senturia, O. Al-Midani et al. · 28th Fluid Dynamics Conference · 1997 · 202 citations

Engineering, Energy Efficiency, Energy Conversion +25

Controlling and Testing the Fracture Strength of Silicon on the Mesoscale

Kuo‐Shen Chen, Arturo A. Ayón, S.M. Spearing · Journal of the American Ceramic Society · 2000 · 119 citations

Engineering, Micromechanics, Mechanical Engineering +22

Viscoelastic Characterization and Modeling of Polymer Transducers for Biological Applications

I-Kuan Lin, Kuang-Shun Ou, Yen-Ming Liao et al. · Journal of Microelectromechanical Systems · 2009 · 83 citations

Engineering, Multiscale Mechanics, Micromechanics +25

Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films

Xingcai Zhang, Kuo‐Shen Chen, Reza Ghodssi et al. · Sensors and Actuators A Physical · 2001 · 81 citations

Materials Science, Materials Engineering, Material Analysis +8