Publication | Closed Access
Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films
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Citations
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References
2001
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringThick TetraethylorthosilicateApplied PhysicsResidual StressThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film Processing
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