Stamp degradation for high volume UV enhanced substrate conformal imprint lithography (UV-SCIL)

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 656 citations

Engineering, Materials Engineering, Materials Science +11

UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

Ran Ji, Michael Hornung, Marc A. Verschuuren et al. · Microelectronic Engineering · 2009 · 144 citations

Engineering, Materials Engineering, Materials Science +16

UV-NIL with working stamps made from Ormostamp

M. Mühlberger, Iris Bergmair, Anna Klukowska et al. · Microelectronic Engineering · 2008 · 60 citations

Natural Sciences, Fine Arts, Microfabrication +2

Improved performance of polarization-stable VCSELs by monolithic sub-wavelength gratings produced by soft nano-imprint lithography

M A Verschuuren, P. Gerlach, H. A. van Sprang et al. · Nanotechnology · 2011 · 42 citations

Engineering, Electrical Engineering, Materials Science +17