Concepedia

Template Wear

Template Wear is a degradation phenomenon in nanoimprint lithography wherein the structural fidelity of a templating master is progressively compromised due to mechanical, chemical, or thermal interactions during repeated imprint cycles.

6

Publications

295

Citations

28

Authors

16

Institutions

Publications per year

2017–2026

0

Parents

Publications

6

Calcination and thermal degradation mechanisms of triblock copolymer template in SBA-15 materials

François Bérubé, Serge Kaliaguine · Microporous and Mesoporous Materials · 2008 · 131 citations

, , +16

Multiple imprinting in UV-based nanoimprint lithography: related material issues

Markus Bender, Martin Otto, B. Hadam et al. · Microelectronic Engineering · 2002 · 73 citations

, , +15

XPS study of the degradation mechanism of fluorinated anti-sticking treatments used in UV nanoimprint lithography

Delphine Truffier‐Boutry, A. Beaurain, R. Galand et al. · Microelectronic Engineering · 2009 · 44 citations

, , +17

Profile evolution during thermal nanoimprint

Hella‐Christin Scheer, N. Bogdanski, M. Wissen et al. · Microelectronic Engineering · 2006 · 20 citations

, , +13

Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography

Santos Merino, A. Retolaza, Helmut Schift et al. · Microelectronic Engineering · 2008 · 15 citations

, , +16

1–5 of 6

Authors

28

  1. YH
    Yoshihiko Hirai

    Osaka Prefecture University, Japan

    1 publications · 20 citations

    1

    h-index

  2. IB
    Iris Bergmair

    Profactor (Austria), Austria

    1 publications · 12 citations

    1

    h-index

  3. BP
    B. Pelissier

    Centre National de la Recherche Scientifique, France

    1 publications · 44 citations

    1

    h-index

  4. AB
    A. Beaurain

    Centre National de la Recherche Scientifique, France

    1 publications · 44 citations

    1

    h-index

  5. HK
    H. Kurz

    RWTH Aachen University, Germany

    1 publications · 73 citations

    1

    h-index

1–5 of 28

Institutions

16

  1. Commissariat à l'Énergie Atomique et aux Énergies Alternatives

    Paris, France

    1 h-index

    6 publications

    264 citations

  2. Université Grenoble Alpes

    Saint-Martin-d'Hères, France

    1 h-index

    6 publications

    264 citations

  3. University of Wuppertal

    Wuppertal, Germany

    1 h-index

    3 publications

    60 citations

  4. Profactor (Austria)

    Steyr, Austria

    1 h-index

    4 publications

    48 citations

  5. Sony Digital Audio Disc Corporation (Austria)

    Anif, Austria

    1 h-index

    1 publications

    12 citations

  6. Laboratoire d'Électronique des Technologies de l'Information

    Grenoble, France

    1 h-index

    6 publications

    264 citations

  7. CEA Grenoble

    Grenoble, France

    1 h-index

    6 publications

    264 citations

  8. Institut polytechnique de Grenoble

    Grenoble, France

    1 h-index

    6 publications

    264 citations

1–8 of 16

Venues

  1. Microelectronic Engineering

    5 publications · 164 citations

    5

    h-index

  2. Microporous and Mesoporous Materials

    1 publications · 131 citations

    1

    h-index

1–2