Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Mold deformation in nanoimprint lithography

F. Lazzarino, C. Gourgon, Patrick Schiavone et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 72 citations

Engineering, Manufacturing Engineering, Materials Science +13

Influence of pattern density in nanoimprint lithography

C. Gourgon, C. Perret, Guillaume Micouin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 58 citations

Natural Sciences, Materials Engineering, Materials Science +17

Viscous flow simulation in nanoimprint using coarse-grain method

A.A. Svintsov, S. I. Zaitsev, Helmut Schift · Microelectronic Engineering · 2006 · 24 citations

Engineering, Manufacturing Engineering, Materials Science +11