F. Lazzarino

Mold deformation in nanoimprint lithography

F. Lazzarino, C. Gourgon, Patrick Schiavone et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 72 citations

Large Area, Engineering, Mechanical Engineering +18

Influence of pattern density in nanoimprint lithography

C. Gourgon, C. Perret, Guillaume Micouin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 58 citations

Materials Science, Engineering, Beam Lithography +14

Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

Zs. Tôkei, V. Vega, Gayle Murdoch et al. · 2020 · 29 citations

Engineering, Vlsi Design, Interconnection Network Architecture +24

Freeform illumination sources: an experimental study of source-mask optimization for 22-nm SRAM cells

Joost Bekaert, Bart Laenens, Staf Verhaegen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations

Engineering, Vlsi Design, Electron-beam Lithography +21

Influence of residual solvent in polymers patterned by nanoimprint lithography

C. Gourgon, J.H. Tortai, F. Lazzarino et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 16 citations

Engineering, Mechanical Engineering, Residual Solvent +17