Concepedia

R. Galand

RG

2

Publications

73

Citations

2

H-Index

2009

Active since

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

CEA Grenoble

Centre National de la Recherche Scientifique

Laboratoire d'Électronique des Technologies de l'Information

Université Grenoble Alpes

R. Galand is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in nanomaterials, microfabrication, and nanofabrication.

Top concepts

Publications per year

2009–2009

2

Publications

2

XPS study of the degradation mechanism of fluorinated anti-sticking treatments used in UV nanoimprint lithography

Delphine Truffier‐Boutry, A. Beaurain, R. Galand et al. · Microelectronic Engineering · 2009 · 44 citations

, , +12

Mold cleaning and fluorinated anti-sticking treatments in nanoimprint lithography

Delphine Truffier‐Boutry, R. Galand, A. Beaurain et al. · Microelectronic Engineering · 2009 · 29 citations

, , +8

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