3D SILICON TRANSFORMATION USING HYDROGEN ANNEALING

Abstract

Fabricating smooth, round structures in silicon is challenging by conventional processing methods. In this paper, we report on a novel 3D shaping technique for producing microspheres, microdisk toroids, submicron wires, and circular beams in Si using hydrogen annealing. Microspheres with 1 m radius, submicron wires with 0.5 m radius, and a microdisk toroid with 0.2 m toroidal radius have been successfully demonstrated.