Concepedia

Hitoshi Tsunoda

HT

1

Publications

33

Citations

1

H-Index

1995

Active since

Affiliations

ShinEtsu Chemical (Japan)(Current)

Hitoshi Tsunoda is an author at ShinEtsu Chemical (Japan) specializing in applied physics, hydrogen, and heat transfer.

Top concepts

HydrogenEngineeringHeat TransferThermodynamicsApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline DefectsThermal Engineering

Publications per year

1995–1995

1

Publications

1

Roughness of Silicon Surface Heated in Hydrogen Ambient

Hitoshi Habuka, Hitoshi Tsunoda, Masanori Mayusumi et al. · Journal of The Electrochemical Society · 1995 · 33 citations

Engineering, Silicon On Insulator, Bare Silicon Surface +17

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