Reiko Hiruta

Shape transformation of silicon trenches during hydrogen annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 80 citations

Materials Science, Afm Observation, Engineering +14

Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)

Koichi Sudoh, Hiroshi Iwasaki, Reiko Hiruta et al. · Journal of Applied Physics · 2009 · 66 citations

Materials Science, Engineering, Hydrogen Annealing +15

Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing

Koichi Sudoh, Hiroshi Iwasaki, Hitoshi Kuribayashi et al. · Japanese Journal of Applied Physics · 2004 · 49 citations

Materials Science, Numerical Study, Engineering +15

Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Japanese Journal of Applied Physics · 2004 · 46 citations

Materials Science, Engineering, Surface Science +13

Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

Reiko Hiruta, H. Kuribayashi, Saburou Shimizu et al. · Applied Surface Science · 2004 · 18 citations

Engineering, Physics, Surface Analysis +9