Concepedia

Hitoshi Kuribayashi

HK

Statistics

Publications

9

Citations

283

H-Index

9

Active since

1988

Affiliations

Fuji Electric (Japan)(Current)

The University of Osaka

University of Tsukuba

Hitoshi Kuribayashi is an author at Fuji Electric (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicrostructureMicroelectronicsPhysicsHydrogenThin FilmsSolid Mechanics

Publications per year

1988–2012

9

Publications

9

Shape transformation of silicon trenches during hydrogen annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 80 citations

Materials Science, Afm Observation, Engineering +14

Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing

Koichi Sudoh, Hiroshi Iwasaki, Hitoshi Kuribayashi et al. · Japanese Journal of Applied Physics · 2004 · 49 citations

Materials Science, Numerical Study, Engineering +15

Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Japanese Journal of Applied Physics · 2004 · 46 citations

Materials Science, Engineering, Surface Science +13

Motional effects between on-center and off-center substitutional nitrogen in silicon

Kouichi Murakami, Hitoshi Kuribayashi, Kohzoh Masuda · Physical review. B, Condensed matter · 1988 · 28 citations

Engineering, N Center, Off-center Substitutional Nitrogen +19

Hydrogen pressure dependence of trench corner rounding during hydrogen annealing

Hitoshi Kuribayashi, Ryōsuke Shimizu, Koichi Sudoh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 23 citations

Materials Science, Engineering, Hydrogen Pressure +12

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