Concepedia
Statistics
Publications
24
Citations
663
H-Index
16
Active since
1995
Affiliations
The University of Osaka(Current)
Fuji Electric (Japan)
Osaka Research Institute of Industrial Science and Technology
University of Hyogo
Konan University
Koichi Sudoh is an author at The University of Osaka specializing in engineering, materials science, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsMicroelectronicsMicrostructureMicrofabricationHydrogenNanoelectronics
Publications per year
1995–2019
Shape transformation of silicon trenches during hydrogen annealing
Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 80 citations
Materials Science, Afm Observation, Engineering +14
Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)
Koichi Sudoh, Hiroshi Iwasaki, Reiko Hiruta et al. · Journal of Applied Physics · 2009 · 66 citations
Materials Science, Engineering, Hydrogen Annealing +15
Application of Silicon on Nothing Structure for Developing a Novel Capacitive Absolute Pressure Sensor
Xiuchun Hao, Sinya Tanaka, Atsuhiko Masuda et al. · IEEE Sensors Journal · 2014 · 51 citations
Biomedical Sensors, Vacuum Void, Nothing Structure +13
Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing
Koichi Sudoh, Hiroshi Iwasaki, Hitoshi Kuribayashi et al. · Japanese Journal of Applied Physics · 2004 · 49 citations
Materials Science, Numerical Study, Engineering +15
Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing
Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Japanese Journal of Applied Physics · 2004 · 46 citations
Materials Science, Engineering, Surface Science +13
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