H. Kuribayashi

Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)

Koichi Sudoh, Hiroshi Iwasaki, Reiko Hiruta et al. · Journal of Applied Physics · 2009 · 66 citations

Materials Science, Engineering, Hydrogen Annealing +15

20mΩcm>sup<2>/sup<660V Super Junction MOSFETs Fabricated by Deep Trench Etching and Epitaxial Growth

Kazutoshi Takahashi, H. Kuribayashi, Tomoyuki Kawashima et al. · 2006 · 18 citations

Semiconductor Technology, Electrical Engineering, Epitaxial Growth +9

Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

Reiko Hiruta, H. Kuribayashi, Saburou Shimizu et al. · Applied Surface Science · 2004 · 18 citations

Engineering, Physics, Surface Analysis +9

New reverse-conducting IGBT (1200V) with revolutionary compact package

Kazutoshi Takahashi, S. Yoshida, Shunsuke Noguchi et al. · 2014 · 17 citations

Electrical Engineering, Engineering, High Voltage Engineering +10

Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

Reiko Hiruta, H. Kuribayashi, Saburou Shimizu et al. · Applied Surface Science · 2004 · 16 citations

Engineering, Physics, Surface Analysis +9