Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing

Tsutomu Sato, Kunihiro Mitsutake, Ichiro Mizushima et al. · Japanese Journal of Applied Physics · 2000 · 84 citations

Micro-structure Transformation, Engineering, Pattern Transfer +19

Shape transformation of silicon trenches during hydrogen annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 80 citations

Materials Science, Afm Observation, Engineering +14

Evidence of spontaneous formation of steps on silicon (100)

Lei Zhong, A. Hojo, Yoshiaki Matsushita et al. · Physical review. B, Condensed matter · 1996 · 54 citations

Engineering, Microscopy, Flat Silicon +16

Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing

Hitoshi Kuribayashi, Reiko Hiruta, Ryōsuke Shimizu et al. · Japanese Journal of Applied Physics · 2004 · 46 citations

Materials Science, Engineering, Surface Science +13

Step arrangement design and nanostructure self-organization on Si surfaces

T. Ogino, Hiroki Hibino, Yoshikazu Homma · Applied Surface Science · 1997 · 37 citations

Materials Science, Step Arrangement Design, Engineering +8