Concepedia

Nobuhiko Sato

NS

4

Publications

112

Citations

4

H-Index

1994

Active since

Affiliations

Canon (Japan)(Current)

Nobuhiko Sato is an author at Canon (Japan) specializing in electrical engineering, applied physics, and integrated circuits.

Top concepts

EngineeringApplied PhysicsIntegrated CircuitsElectrical EngineeringSurface ScienceMaterial ScienceMicroelectronicsThin FilmsMicrofabricationElectrical Insulation

Publications per year

1994–2005

4

Publications

4

Hydrogen annealed silicon-on-insulator

Nobuhiko Sato, T. Yonehara · Applied Physics Letters · 1994 · 72 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Extremely High Selective Etching of Porous Si for Single Etch-Stop Bond-and-Etch-Back Silicon-on-Insulator

Kiyofumi Sakaguchi, Nobuhiko Sato, Kenji Yamagata et al. · Japanese Journal of Applied Physics · 1995 · 17 citations

Engineering, High Selective Etching, Integrated Circuits +16

Current Progress in Epitaxial Layer Transfer (ELTRAN)

Kiyofumi Sakaguchi, Nobuhiko Sato, Kenji Yamagata et al. · IEICE Transactions on Electronics · 1997 · 13 citations

Current Progress, Applied Physics, Multilayer Heterostructures +2

Practical High-Resistivity Silicon-on-Insulator Solution for Spiral Inductors in Radio-Frequency Integrated Circuits

Junichi Kodate, Takakuni Douseki, Tsuneo Tsukahara et al. · Japanese Journal of Applied Physics · 2005 · 10 citations

Electrical Engineering, Engineering, Rf Semiconductor +12

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