Concepedia

Kiyofumi Sakaguchi

KS

5

Publications

354

Citations

5

H-Index

1994

Active since

Affiliations

Canon (Japan)(Current)

Kiyofumi Sakaguchi is an author at Canon (Japan) specializing in applied physics, engineering, and surface science.

Top concepts

Applied PhysicsEngineeringSurface ScienceMaterial ScienceIntegrated CircuitsMaterials EngineeringElectrical EngineeringSemiconductorsMicroelectronicsThin Films

Publications per year

1994–1997

5

Publications

5

Epitaxial layer transfer by bond and etch back of porous Si

T. Yonehara, Kiyofumi Sakaguchi, Nobuhiko Sato · Applied Physics Letters · 1994 · 228 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Epitaxial Growth on Porous Si for a New Bond and Etchback Silicon‐on‐Insulator

Nobuhiko Sato, Kiyofumi Sakaguchi, Kenji Yamagata et al. · Journal of The Electrochemical Society · 1995 · 71 citations

Materials Science, Semiconductors, Materials Engineering +13

Advanced Quality in Epitaxial Layer Transfer by Bond and Etch-back of Porous Si

Nobuhiko Sato, Kiyofumi Sakaguchi, Kenji Yamagata et al. · Japanese Journal of Applied Physics · 1996 · 25 citations

Engineering, Optoelectronic Devices, Integrated Circuits +20

Extremely High Selective Etching of Porous Si for Single Etch-Stop Bond-and-Etch-Back Silicon-on-Insulator

Kiyofumi Sakaguchi, Nobuhiko Sato, Kenji Yamagata et al. · Japanese Journal of Applied Physics · 1995 · 17 citations

Engineering, High Selective Etching, Integrated Circuits +16

Current Progress in Epitaxial Layer Transfer (ELTRAN)

Kiyofumi Sakaguchi, Nobuhiko Sato, Kenji Yamagata et al. · IEICE Transactions on Electronics · 1997 · 13 citations

Current Progress, Applied Physics, Multilayer Heterostructures +2

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